TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Archive for the ‘製品紹介’ Category

We sell rare items such as ESC!
2016/12/15

Item:MITSUBISHI FT700-A101 Turbo pump and FTI-700-T7 controller

Quantity:5set

Condition: refurbished condition

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

0101-2

Item:AMAT ESC 0010-27430

Quantity:1set

Condition: Refurbished

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

IMG_7064 IMG_7075 IMG_7266

Item:AMAT ESC 0010-24456

Quantity:1set

Condition: Refurbished

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

IMG_7084 IMG_7083 IMG_7270

Item:LAM ESC 839-019090-324

Quantity:3set

Condition: Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

324-表面

342-4
02-2

Item:LAM ESC 839-019090-608

Quantity:3set

Condition: Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

608-表面

608-3
03-2

Item:LAM ESC 839-800327-315

Quantity:3set

Condition: Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

Lam ESC 315 表面

315-4
04-2

Item:LAM ESC 839-800327-390

Quantity:3set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

390-表面

05-105-2

Item:TEL ESC 3D10-100930-13

Quantity:3set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

06-106-2

 

Item:Turbomolecular Pump controller TCP380

Quantity:1set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

08-108-2

 

Item: Shower head 0040-87958-004

Quantity:4 set

Condition:OEM new

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

09-109-209-3

Item: ENI DCG-200ZH-S00 DC Plasma Generator

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

10-110-210-3

Item:Turbo molecular pump controller TD20

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

11-111-2

 

 

Item:Micro Wave Survey Meter HI-1801

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

13-113-2

 

 

Item:RF Generator Ovation2560SF/3150295

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

15-1

15-2

Item:Servo Driver MR-SD20

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

16-116-2

 

 

Item:RPS 3151801-004

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

17-1

17-2

Item:RF Generator HFA-50A

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

18-118-2

 

Item:FT700-A1K1 turbo molecular pump

Quantity:1 set

Condition:Used, got cleaned

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

19-119-2

Item:TELIUS SP TOP matcher AMN-50B2

Quantity:2 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

20-120-2

Item:Producer aluminum heater 0010-33992

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

21-1

 

 

Item:VECTOR PEDESTAL HEATER(300mm)

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

22-1

Item:Gas mixing unit MU-1213

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

23-1

 

 

 

Item:SMC chiller INR-498-016C

Quantity:2 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

25-225-1

 

 

 

Item:Pivot 0010-03667 Rev002

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

26-1

 

Item:VCR GASKETS SS-4-VCR-2-GR-VS

Quantity:9 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

 

Item:AE RF power supply(APEX1513) 3156110-005D

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

27-127-2

 

Item:ILD-0433用ROBOT RR304L90

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

28-1

 

Item:ENI製Spectrum13.56MHz電源 B-10513

Quantity:1 set

Condition:refurbished condition

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

29-1

29-2

Item:Heater block HHB-200-01

Quantity:1 set

Condition:OEM new

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

30-1

 

 

 

Item:PTI-1500-T9 Turbo molecular pump controller

Quantity:13 set

Condition:OEM new

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

32-1

32-2

Item:MKS DC power supply DCG-200E 0190-12212

Quantity:1 set

Condition:refurbished condition

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

 

Item:MKS DC power supply DCG-200Z 0190-08033

Quantity:1 set

Condition:refurbished condition

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

 

Item:MKS DC power supply DCG-200Z 0190-08034

Quantity:1 set

Condition:refurbished condition

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

 

Item:Turbomolecular Pump controller SCU-301C

Quantity:1 set

Condition:refurbished condition

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

 

Item:Turbo molecular Pump controller D8220

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

34-134-2

 

 

Item:Turbo molecular Pump controller 305W-A

Quantity:3 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

 

Item:DC24V POWER 15w EWS-15-24

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

35-1

 

Item:Trap Assy 3M87-050629-12

Quantity:1 set

Condition:新品

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

 

 

Item:Turbo molecular Pump controller SCU-H2001K2

Quantity:1 set

Condition:Used

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

36-1001

 

 

 

Item: SHIN-ETSU QUARTZ TUBE PROCESS 94.8L

Quantity:2 set

Condition: OEM NEW

Price: Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

IMG_8833_meitu_1IMG_8837_meitu_2IMG_8832_meitu_3
Item:CANON ANELVA TURBO MOLECULAR PUMP,  ICP. TG1110EMVA, P/N: N50003337

Quantity:1 set

Condition:OEM Refurbished

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp。

IMG_6911_meitu_5IMG_6908_meitu_4IMG_6913_meitu_6

Item:CABLE, LASER DIODE W/F.O. AMAT P/N: 1100-A0110

Quantity:5 set

Condition:OEM NEW

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

IMG_6840_meitu_12IMG_6844_meitu_9IMG_6851_meitu_10

Item: AE RF Generator  2.165MHZ 8KW HFV 8K-192; P/N: 0190-15553

Quantity:2 set

Condition:OEM refurbished

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp

IMG_7128_meitu_14IMG_7160_meitu_13IMG_7153_meitu_15

Item:AE APEX  REVJ RF Generator 13.56MHZ 10KW; P/N: 0190-15552W

Quantity:2 set

Condition:OEM refurbished

Price:Negotiable

If interested please contact our mail:sales@tmh-inc.co.jp



IMG_7180_meitu_16IMG_7200_meitu_17IMG_7209_meitu_18

TMH can continuously provide overhual/repair service for Leybold Mag2000 Turbo Pump and Mag Drive Controller.
2013/06/02

leybold homepage

 

Leybold純正メーカーは下記のMag2000ターボポンプを2015年3月末、Mag Driveコントローラは2013年3月末にて修理サービスを終了します。

Type Model DESCRIPTION Leybold P/N
Turbo Pump Mag 2000 Pump Turbo 409 4GPM Leybold Mag2000C ISO-K 400045V0012
Turbo Pump Mag 2000 TMP,2000L,TURBO PUMP,LEYBOLD 89416
Turbo Pump Mag 2000 PUMP,TURBO,LEYBOLD,MAG2000C,W/PURGE 400045V0009
Controller Mag Drive CNTRLR Turbo Pump Leybold HDP300 400034V0001
Controller Mag Drive CNTRLR,TURBO PUMP,LEYBOLD,HDP300 400034V0011
Controller Mag Drive CNTRLR 1/2 Rack L2000 12135

しかしながら、弊社は引き続き修理・オーバーホールをさせて頂く事が可能でございます。

詳しくはsales@tmh-inc.co.jpにお問い合わせ下さい。

TMH starts to provide refurbishment service for MCA ESC・Ceramic Heater・Magnet.
2013/06/01

投稿1

MCA E-Chuck Heater(150mm, 200mm, 300mm), PVD ESC, ALN Heater, CVD Ceramic Heater, AMAT Magnet and TEL  Magnet are all repairable。

Main models are as following:
– AMAT Producer Ceramic Heater (200mm, 300mm)
– 200mm DCxZ Ceramic Heater (Giga fill ALN Heater)
– 200mm DxZ Ceramic Heater
– 200mm TixZ Ceramic Heater (Gigafill ALN Heater)
– 200mm DcSxZ Ceramic Long Shaft Heater
– AMAT Dual Zone Ceramic Heater(200mm, 300mm)
– 300mm TEL Trias Stage Ceramic Heater
– AMAT CWXZ Ceramic Heater (200mm, 300mm)
– 300mm Purge Ceramic Heater
– Genus CVD 300mm ALN Heater
– APF Producer Ceramic Heater (200mm, 300mm)
– MCA E-Chuck Heater [PVD ESC]

 

For more information, please refer to ESC repair list

◆If the model you are searching is not listed, feel free to contact us via sales@tmh-inc.co.jp for more details.

We look forward the chance to serve you.