TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Cryo Pump


  • A100L
  • A200
  • A200-AS3H
  • A200-AS3NES
  • A200D
  • A200F
  • A200F-AS3NES
  • A200FD
  • A200G
  • A250F
  • A300
  • A300-AS2N
  • A300-AS3H
  • A300-AS3NES
  • A300D
  • A300F
  • A300F-AS3NES
  • A300FD

Only part of repair list is stated. Unlisted model is also repairable.

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