TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Generator

ANELVA

Below models are all repairable. Some model is available for exchange according to inventory. Contact us for updated information.

  • PRF-035B RF GENERATOR
  • PRF-065 RF GENERATOR
  • PRF-075 RF GENERATOR
  • PRF-105 RF GENERATOR
  • PRF-125 RF GENERATOR

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.