TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Generator

DAIHEN

Below models are all repairable. Some model is available for exchange according to inventory. Contact us for updated information.

  • AGA-27B RF GENERATOR
  • AGA-50B RF GENERATOR
  • DRFS-10SB RF GENERATOR
  • MFG-15SA RF GENERATOR
  • MFG-20SA RF GENERATOR
  • RGA-10A RF GENERATOR
  • WGA-30A RF GENERATOR
  • WGA-30C RF GENERATOR
  • WGA-50E RF GENERATOR
  • RMN-30 RF MATCHER
  • RMN-50H1 RF MATCHER
  • RMN-6C RF MATCHER
  • RGA-400 RF Generator
  • RGA-300C2 RF Generator
  • RGA-150A RF Generator
  • RGA-50C RF Generator
  • RGA-30 RF Generator
  • AGA-30 RF Generator
  • AGA-27 RF Generator
  • AGA-50B2 RF Generator
  • MFG-15SA6 RF Generator
  • MFG-20B RF Generator
  • MFG-20SA Controller RF Generator
  • MFG-20SA3 RF Generator
  • MGA-20A RF Generator
  • MGA-30 RF Generator
  • MGA-50 RF Generator
  • SGP151HV RF Generator
  • SGP101HV RF Generator
  • SGP-30 RF Generator
  • SGP-50 RF Generator
  • SVP-15 RF Generator
  • AMN-30 Matching Box
  • AMN-50 Matching Box
  • AMN-30C11 Matching Box
  • AMN-50B2 Matching Box
  • AMN-50H Matching Box
  • AMN-50L Matching Box
  • AMN-50K Matching Box
  • AMN-50F Matching Box
  • MFM-20SA Matching Box
  • NX-AMN-50E3 Matching Box
  • RMN-100B1 Matching Box
  • RMN-200A Matching Box
  • RMN-200B Matching Box
  • RMN-300 Matching Box
  • RMN-25A Matching Box
  • RMN-50N Matching Box
  • RMN-75A2 Matching Box
  • RMN-50RA Matching Box
  • RMN-10 Matching Box
  • RMN-50P Matching Box
  • RMN-50T Matching Box
  • RMN-50U Matching Box
  • RMN-50W Matching Box
  • WMN-50C6 Matching Box
  • WMN-50H6A Matching Box
  • HFA-50A RF Generator RF Generator

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.