TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Generator

MKS

Below models are all repairable. Some model is available for exchange according to inventory. Contact us for updated information.

  • Optima OPT-50 DC Power Supply
  • Optima OPT-100 DC Power Supply
  • Optima OPT-200 DC Power Supply
  • Optima OPT-400 DC Power Supply
  • Optima OPT-600 DC Power Supply
  • Optima OPT-800 DC Power Supply
  • RPDG-50 RF Generator
  • RPDG-100 RF Generator
  • RPDG-200 RF Generator
  • OEM-6J RF Generator
  • OEM-12A XL RF Generator
  • OEM-12B-01 RF Generator
  • OEM-25-11481 RF Generator
  • OEM-25N-11481 RF Generator
  • OEM-25N-XL RF Generator
  • OEM-6 XL RF Generator
  • OEM-650A XL RF Generator
  • OEM-650A-02 RF Generator
  • OB2 RF Generator
  • DOFBC2-083 RF Generator
  • PL-2HF-11451-55 RF Generator
  • ACG-10-XL RF Generator
  • ACG-3B-06 RF Generator
  • GEW-30A RF Generator
  • GHW-25A RF Generator
  • QL6513 RF Generator
  • RPG-50 RF Generator
  • ACG-5J-11891 RF Generator
  • PL-2HF-11451 RF Generator
  • SPECTRUM 11002-00 RF Generator
  • Spectrum 3013 RF Generator
  • ELITE 750 RF Generator
  • MKS SPECTRUM B-1513 RF Generator
  • SPECTRUM B 5002 RF Generator
  • DOFBC2-075 RF Generator
  • MW-20LD-HN Matching Box
  • MW-25D-02M3J1 Matching Box
  • MW2-60 Matching Box
  • MWD-25LD-06 Matching Box
  • MWD-25LD-02 Matching Box
  • MWH-5 Matching Box
  • ABX-X490 SSD Board
  • ABX-X348 SSD Board
  • ABX-X279 SSD Board
  • AX7635-03 RPS
  • AX7640-01 RPS
  • AX7651-2 RPS
  • AX7665-02 RPS
  • AX7667-01 RPS
  • AX7670-02 RPS
  • AX7670-06 RPS
  • AX7670-15 RPS
  • AX7670-16 RPS
  • AX7670-19 RPS
  • AX7685-01 RPS
  • AZ7670-15 RPS
  • FI20620-1 RPS
  • FI20656-1 RPS
  • FI80132 RPS
  • FI80146 RPS
  • 0190-33638 RF Generator Spectrum13.56MHz B-10513-00 F
  • 0190-12213 DC Power Supply DCG-200E DCG-200E
  • 0190-22918/002 DC Power Supply DCG-200 DCG-200ZH-S00
  • 0190-22918W/002 DC Power Supply DCG-200 DCG-200ZH-S00
  • 0190-12212 DCG-200E-S00 MKS製DC電源DCG-200E DC POWER SUPPLY
  • 0190-08033 DC24M-Z041300110A MKS製DC電源DCG-200Z DC POWER SUPPLY
  • 0190-08034 DC22S-Z022000010A MKS製DC電源DCG-200Z DC POWER SUPPLY

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.