TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Robot

AMAT

Below models are all repairable. Some model is available for exchange according to inventory. Contact us for updated information.

Controller for the listed robot model are all repairable. 

  • 0010-19040 VHPe Robot
  • 0010-23249 Producer VHP Robot
  • 0242-81833 Centura VHP Robot
  • 0040-03664 Centura VHP+ Robot
  • 0010-70650 VHP+ ROBOT
  • 0010-31899 VHP ROBOT(300mm NON-PLT Water)
  • 0010-31766 VHP-E ROBOT

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.