TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Robot

株式会社TMH > Product Information

AMAT

Below models are all repairable. Some model is available for exchange according to inventory. Contact us for updated information.

Controller for the listed robot model are all repairable.　

  • 0010-19040 VHPe Robot
  • 0010-23249 Producer VHP Robot
  • 0242-81833 Centura VHP Robot
  • 0040-03664 Centura VHP+ Robot
  • 0010-70650 VHP+ ROBOT
  • 0010-31899 VHP ROBOT(300mm NON-PLT Water)
  • 0010-31766 VHP-E ROBOT

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.