TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Robot

PRI/EQUIPE(BROOKS)

Below models are all repairable. Some model is available for exchange according to inventory. Contact us for updated information.

Controller for the listed robot model are all repairable. 

  • ESC-200 PREALIGNER/CONTROLLER
  • ESC-201 PREALIGNER/CONTROLLER
  • ESC-212 PREALIGNER/CONTROLLER
  • ESC-212B PREALIGNER/CONTROLLER
  • ESC-218 PREALIGNER/CONTROLLER
  • ESC-222 PREALIGNER/CONTROLLER
  • PRE-200 PREALIGNER/CONTROLLER
  • PRE-200B PREALIGNER/CONTROLLER
  • PRE-201 PREALIGNER/CONTROLLER
  • PRE-201B PREALIGNER/CONTROLLER
  • PRE-300 PREALIGNER/CONTROLLER
  • PRE-300B PREALIGNER/CONTROLLER
  • PRE-300-CG-CE PREALIGNER/CONTROLLER
  • PRE-301 PREALIGNER/CONTROLLER
  • PRE-301B PREALIGNER/CONTROLLER
  • ABM405-1-NOZ ROBOT
  • ATM-104-1 ROBOT
  • ATM-105 ROBOT
  • ATM-105-2 ROBOT
  • ATM-107 ROBOT
  • ATM-1x4 ROBOT
  • ATM-305 ROBOT
  • ATM-405 ROBOT
  • ATM-407 ROBOT
  • ATM-407b ROBOT
  • AxM-204 ROBOT
  • AxM-205 ROBOT
  • AxM-207 ROBOT
  • AxM-305 ROBOT
  • AxM-307 ROBOT
  • AxM-405 ROBOT
  • DBM-2405 ROBOT
  • DBM-2406 ROBOT
  • DBM-2407 ROBOT
  • DBM-2407-V2 ROBOT
  • DBM-2506 ROBOT
  • DBM-2507 ROBOT
  • DBM-2607 ROBOT
  • RC400M ROBOT
  • TSB-2407 ROBOT
  • WTM-107 ROBOT
  • WTM-407 ROBOT
  • WTM-511 ROBOT

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.