TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Turbo pump

MITSUBISHI

Below models are all repairable. Some model is available for exchange according to inventory. Contact us for updated information.

Controller for the listed turbo model are all repairable.

  • FT1200W ・ (A1K1)
  • FT1400W ・ (A1K1)
  • FT2200W
  • FT3000W
  • FT3300W
  • FT3301W
  • FT-350D-VG250NS
  • FT700 ・ (A1K1)
  • FT700W ・ (A1K1)
  • FT800W ・ (A1K1)
  • PT150
  • PT1500
  • PT500
  • FT1200W
  • FTI-700
  • FT-700-A101
  • FTI-700-T7
  • FT2200W-W2E1 FT2200W
  • FT700-A1K1 TMP
  • FT-2200W−W101 TMP

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.