TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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ESC

AMAT

Below models are all repairable. Contact us for updated information.

  • 0010-06875 200mm MCA Puck ESC Pink Color Endura ESC
  • 0010-34561 200mm MCA Puck ESC Pink Color Endura ESC
  • 0200-06584 201mm MCA Puck ESC Pink Color Endura ESC
  • 0200-76086 202mm MCA Puck ESC Pink Color Endura ESC
  • 0200-76086 203mm MCA Puck ESC Pink Color Endura ESC
  • 15-270165-00 300mm Novellus Inova Double Gap Semco ESC ESC
  • 0010-01166 200mmm MCA Heater HEATER
  • 0010-01286 200mmm MCA Heater HEATER
  • 0010-01625 200mmm MCA Heater HEATER
  • 0010-01925 200mmm MCA Heater HEATER
  • 0010-02342 200mm DxZ Ceramic Heater HEATER
  • 0010-02461 201mm DxZ Ceramic Heater HEATER
  • 0010-02467 202mm DxZ Ceramic Heater HEATER
  • 0010-03030 200mmm MCA Heater HEATER
  • 0010-03254 200mmm MCA Heater HEATER
  • 0010-03287 200mm Producer Certura Heater HEATER
  • 0010-03840 200mm Producer Certura Heater HEATER
  • 0010-03841 200mm Producer Certura Heater HEATER
  • 0010-04448 200mmm MCA Heater HEATER
  • 0010-04450 200mmm MCA Heater HEATER
  • 0010-04978 300mm Producer Cer. Heater HEATER
  • 0010-05030 200mm Dual Zone Ceramic Heater HEATER
  • 0010-06205 200mmm MCA Heater HEATER
  • 0010-06825 203mm DxZ Ceramic Heater HEATER
  • 0010-07815 300mmm MCA Heater HEATER
  • 0010-08265 300mm Producer Cer. Heater HEATER
  • 0010-08605 300mm Producer Cer. Heater HEATER
  • 0010-08901 200mm Producer Certura Heater HEATER
  • 0010-11681 300mm Producer Cer. Heater HEATER
  • 0010-11908 300mm Producer Cer. Heater HEATER
  • 0010-12282 200mm Producer Certura Heater HEATER
  • 0010-12814 200mm Dual Zone Ceramic Heater HEATER
  • 0010-13314 200mmm MCA Heater HEATER
  • 0010-13895 200mmm MCA Heater HEATER
  • 0010-15961 200mmm MCA Heater HEATER
  • 0010-17871 200mm Producer Certura Heater HEATER
  • 0010-21839 200mmm MCA Heater HEATER
  • 0010-21840 200mmm MCA Heater HEATER
  • 0010-22134 300mmm MCA Heater HEATER
  • 0010-22166 200mmm MCA Heater HEATER
  • 0010-22180 200mmm MCA Heater HEATER
  • 0010-22184 300mmm MCA Heater HEATER
  • 0010-22186 200mmm MCA Heater HEATER
  • 0010-22988 300mmm MCA Heater HEATER
  • 0010-23014 300mm Producer Cer. Heater HEATER
  • 0010-23066 300mmm MCA Heater HEATER
  • 0010-23068 300mmm MCA Heater HEATER
  • 0010-23794 300mm Producer Cer. Heater HEATER
  • 0010-24189 300mm Producer Cer. Heater HEATER
  • 0010-24300 300mm Producer Cer. Heater HEATER
  • 0010-24367 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0010-24685 300mm Producer Cer. Heater HEATER
  • 0010-25323 200mm Producer Certura Heater HEATER
  • 0010-25415 200mm Producer Certura Heater HEATER
  • 0010-25416 300mm Producer Cer. Heater HEATER
  • 0010-27430 300mmm MCA Heater HEATER
  • 0010-28081 300mm Producer Cer. Heater HEATER
  • 0010-29128 300mm Producer Cer. Heater HEATER
  • 0010-29675 200mm Producer Certura Heater HEATER
  • 0010-30838 300mm Producer Cer. Heater HEATER
  • 0010-31708 300mm Producer Cer. Heater HEATER
  • 0010-31709 300mm Producer Cer. Heater HEATER
  • 0010-31724 300mm Producer Cer. Heater HEATER
  • 0010-31871 300mm Producer Cer. Heater HEATER
  • 0010-31879 300mm Producer Cer. Heater HEATER
  • 0010-31987 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0010-33992 HEATER
  • 0010-36734 300mm Producer Cer. Heater HEATER
  • 0010-36736 300mm Producer Cer. Heater HEATER
  • 0010-36738 300mm Producer Cer. Heater HEATER
  • 0010-36740 300mm Producer Cer. Heater HEATER
  • 0020-23478 200mmm MCA Heater HEATER
  • 0040-02408 204mm DxZ Ceramic Heater HEATER
  • 0040-02450 205mm DxZ Ceramic Heater HEATER
  • 0040-02539 206mm DxZ Ceramic Heater HEATER
  • 0040-04048 300mm Producer Cer. Heater HEATER
  • 0040-07024 300mm Producer Cer. Heater HEATER
  • 0040-07033 300mm Producer Cer. Heater HEATER
  • 0040-07953 200mm Dual Zone Ceramic Heater HEATER
  • 0040-33788 200mm Dual Zone Ceramic Heater HEATER
  • 0040-36383 207mm DxZ Ceramic Heater HEATER
  • 0040-37010 208mm DxZ Ceramic Heater HEATER
  • 0040-37593 209mm DxZ Ceramic Heater HEATER
  • 0040-38097 210mm DxZ Ceramic Heater HEATER
  • 0040-40508 211mm DxZ Ceramic Heater HEATER
  • 0040-42700 212mm DxZ Ceramic Heater HEATER
  • 0040-44585 300mm Producer Cer. Heater HEATER
  • 0040-45008 200mm Producer Certura Heater HEATER
  • 0040-47318 200mm Producer Certura Heater HEATER
  • 0040-49020 300mm Producer Cer. Heater HEATER
  • 0040-51612 200mm Producer Certura Heater HEATER
  • 0040-53976 300mm Producer Cer. Heater HEATER
  • 0040-61269 200mm Producer Certura Heater HEATER
  • 0040-61269 213mm DxZ Ceramic Heater HEATER
  • 0040-70479 200mm Producer Certura Heater HEATER
  • 0040-70479 214mm DxZ Ceramic Heater HEATER
  • 0040-82421 300mm Producer Cer. Heater HEATER
  • 0040-84051 300mm Producer Cer. Heater HEATER
  • 0040-85475 300mm Producer Cer. Heater HEATER
  • 0040-86263 200mm Producer Certura Heater HEATER
  • 0040-88188 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0040-MF612 200mm Producer Certura Heater HEATER
  • 0041-01652 300mm Producer Cer. Heater HEATER
  • 0041-04679 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0041-08919 300mm V7 Vaccum Purge Ceramic Heater HEATER
  • 0190-00381 200mmm MCA Heater HEATER
  • 0190-03501 200mm Producer Certura Heater HEATER
  • 0190-03516 215mm DxZ Ceramic Heater HEATER
  • 0190-05083 300mm Producer Cer. Heater HEATER
  • 0190-21581 200mmm MCA Heater HEATER
  • 0190-21597 200mmm MCA Heater HEATER
  • 0190-21758 200mmm MCA Heater HEATER
  • 0190-21764 200mmm MCA Heater HEATER
  • 0200-200MC 200mm Producer Certura Heater HEATER
  • 0200-35527 200mm Producer Certura Heater HEATER
  • 0200-37359 200mm Producer Certura Heater HEATER
  • PAA63395 200mm Producer Certura Heater HEATER
  • 0040-48594 "ULTIMA ESC 12"" HDP Ultima ESC"
  • 0040-18219 "ULTIMA ESC 8"" HDP Ultima ESC"
  • 0040-18208 "ULTIMA ESC 8"" HDP Ultima ESC"
  • 0010-01166 MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)
  • 0010-01167 MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)
  • 0010-01196 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-17812 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0010-17831 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0010-01288 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-01926 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-03028 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-03361 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-04451 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0010-04452 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-13313 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-13897 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-21836 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-21946 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-22167 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-22408 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0010-22411 MCA ESC 200mm AMAT MCA E-Chuck Assy(JW)
  • 0190-00382 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0190-21442 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0190-21443 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0190-21759 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0190-22094 MCA ESC 200mm AMAT MCA E-Chuck Assy(J)
  • 0010-04448 MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)
  • 0010-04450 MCA ESC 200mm AMAT MCA E-Chuck Assy(SW)
  • 0010-08017 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0010-08750 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0010-12516 MCA ESC 200mm AMAT MCA E-Chuck Assy(SB)
  • 0040-05493 E-MAX ESC 200mm E-Max Ceramic ESC Assy
  • 0040-40979 E-MAX ESC 200mm E-Max Ceramic ESC Assy
  • 0040-40981 E-MAX ESC 200mm E-Max Ceramic ESC Assy
  • 0040-70250 E-MAX ESC 200mm E-Max Ceramic ESC Assy
  • 0010-05994 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0010-05995 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0010-06229 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-00876 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-04951 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-05370 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-40978 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-40980 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-43558 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0040-44645 E-MAX ESC 200mm E-Max Ceramic ESC Assy (Eps
  • 0010-06788 DPS ESC 300m Ultima DPS ESC assy (ETCH ESC)
  • 0010-30277 DPS ESC 300m Ultima DPS ESC assy (ETCH ESC)
  • 0190-23942 DPS ESC 300m Ultima DPS ESC assy (ETCH ESC)
  • 0010-33416 AMAT ESC 300mm AMAT ESC Assy
  • 0041-06414 AMAT ESC 300mm AMAT ESC Assy
  • 0041-07781 AMAT ESC 300mm AMAT ESC Assy
  • 0010-03773 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-03774 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-06874 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-07815 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-11343 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-14204 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-15431 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-16109 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-16858 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-16986 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-17111 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-19971 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-20746 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0010-22134 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-22183 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0010-22184 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-22985 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-22988 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-23066 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-23068 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-23677 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-23803 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-24076 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-24356 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-24358 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-24456 MCA ESC 300mm AMAT MCA E-Chuck Assy(OB)
  • 0010-27430 MCA ESC 300mm AMAT MCA E-Chuck Assy(NW)
  • 0010-27431 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-27983 MCA ESC 300mm AMAT MCA E-Chuck Assy(OW)
  • 0010-29710 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0020-08825 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0021-22182 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-23068 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-23680 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-48399 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-70754 MCA ESC 300mm AMAT MCA E-Chuck Assy
  • 0040-33215 ULTIMA ESC 300mm Dual HE HDPCVD ESC
  • 0040-49504 E-MAX ESC 300mm E-Max Ceramic ESC Assy
  • 0040-49519 E-MAX ESC 300mm E-Max Ceramic ESC Assy
  • 0200-02936 "MCA ESC 300mm Endura Puck Assy
  • 0010-54667 MCA ESC 300mmm AMAT MCA E-Chuck Assy
  • 0041-26722 AMAT ESC 300mm AMAT ESC Assy
  • 0041-26723 AMAT ESC 300mm AMAT ESC Assy
  • 0040-81673 AMAT ESC 300mm AMAT ESC Assy
  • 0040-53718 AMAT ESC 300mm AMAT ESC Assy
  • 0040-81674 AMAT ESC 300mm AMAT ESC Assy
  • 0040-02987 "ULTIMA ESC 300MM DUAL HE

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.


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