TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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ESC

NOVELLUS

Below models are all repairable. Contact us for updated information.

  • 02-121096-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 02-121642-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 02-134263-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 02-267095-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 05-134263-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 15-028190-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 15-118976-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 15-121119-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 15-124447-05 SPEED ESC 200mm Novellus Speed HDP ESC
  • 02-134264-00 SPEED ESC 200mm Novellus Speed HDP ESC
  • 05-134264-00 SPEED ESC 200mm Novellus Speed HDP ESC

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.