TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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ESC

VARIAN

Below models are all repairable. Contact us for updated information.

  • E11098654 VARIAN ESC 200mm Varian E-Clamp ESC Assy (
  • E17132760 VARIAN ESC 200mm Varian E-Clamp ESC Assy (
  • E11031424 VARIAN ESC 200mm Varian E-clamp ESC Platen

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.