TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

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Parts

LAM

  • 853-012123-001 ASSY ARM DRIVE
  • 853-031776-001 PADDLE LIFT ASSY
  • 853-012123-00X LAM Harmonic Arm Driver Assy|150MM/200MM
  • 853-032776-002 Lam TCP-9600 Paddle Lift|150MM
  • 853-012200-00X LAM Inner Gate Assy|150MM/200MM
  • 853-013542-002 LAM 4xxx ISO Valve|150MM/200MM
  • 853-013521-001 LAM 4xxx ISO Valve|150MM/200MM
  • 853-360073-001 LAM 9400 Turbo Bypass Valve|150MM/200MM
  • 853-032983-001 LAM 9400 Turbo ISO Valve|150MM/200MM
  • 853-032123-002 LAM ISO Valve| DSQ Chamber|150MM/200MM

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.


The item you are searching for is on LAYLA.
https://www.layla-ec.com/https://www.layla-ec.com/

LAYLA is an online marketplace engineered for the global semiconductor industry. The site is run by TMH.