TMH Incorporation(TMH Inc.)

Turbo Pump・Robot・RF Generator・ESC&Ceramic Heater Refurbish, Brand New&Refurbished Semiconductor-related Parts Sales, Equipment Relocation,etc

Select Language



  • 853-012123-001 ASSY ARM DRIVE
  • 853-031776-001 PADDLE LIFT ASSY
  • 853-012123-00X LAM Harmonic Arm Driver Assy|150MM/200MM
  • 853-032776-002 Lam TCP-9600 Paddle Lift|150MM
  • 853-012200-00X LAM Inner Gate Assy|150MM/200MM
  • 853-013542-002 LAM 4xxx ISO Valve|150MM/200MM
  • 853-013521-001 LAM 4xxx ISO Valve|150MM/200MM
  • 853-360073-001 LAM 9400 Turbo Bypass Valve|150MM/200MM
  • 853-032983-001 LAM 9400 Turbo ISO Valve|150MM/200MM
  • 853-032123-002 LAM ISO Valve| DSQ Chamber|150MM/200MM

Only part of repair list is stated. Unlisted model is also repairable.

Contact us for more information.

The item you are searching for is on LAYLA.

LAYLA is an online marketplace engineered for the global semiconductor industry. The site is run by TMH.