- 02-00093-00 ASSY｜ ONE-ARM ROBOT
- 16-144643-00 Novellus Pedestal Lifter｜300MM
- 19-100586-00 Novellus Bellow｜ Pedestal Cylinder｜300MM
- 16-128855-00 Novellus Bellow｜ Argon Dump｜300MM
- 60-680027-00 Novellus ISO Valve (MDC)｜200MM/300MM
Only part of repair list is stated. Unlisted model is also repairable.
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