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ターボ分子ポンプオーバーホール・ロボット定額修理・RF電源定額修理・ESC再生、各種半導体用パーツ販売、装置移設など

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Valve

VAT

下記型式のバルブは全て定額修理対応可能です。

  • S61.1(61144-PA52) BUTTERFLY VALVE
  • S61.2(61236-PAGC) BUTTERFLY VALVE
  • Actuator with Controller 650| 651 Series Pressure Control Valve PHCG type only CONTROLLER
  • PM-4 Remote control service box interface for S-64.0 and S-64.2 CONTROLLER
  • PM-5 Local and remote control for S-64.0 and S-64.2 CONTROLLER
  • PM-6 Remote control service box interface for S-61.0 and S-65.0 CONTROLLER
  • PM-7 Local and remote control for S-65.0 Pendulum valve CONTROLLER
  • PM-7E Remote control service box interface for S-65.0 Pendulum valve CONTROLLER
  • 1028 GATE VALVE
  • 1032 PNEUMATIC GATE VALVE
  • 1032 GATE VALVE
  • 1034 GATE VALVE
  • 17432 GATE VALVE
  • 01034-KE24 GATE VALVE
  • 02110-BA24 GATE VALVE
  • 02110-BE24 GATE VALVE
  • 02112-BA24 GATE VALVE
  • 08040-FA44 GATE VALVE
  • 08140-FA44 GATE VALVE
  • 10844-PE44 GATE VALVE
  • 10846-CE24 GATE VALVE
  • 10846-UE24 GATE VALVE
  • 10846-XE28 GATE VALVE
  • 12040-FE24 GATE VALVE
  • 12040-PA24 AMAT 3870-02287 GATE VALVE
  • 12040-PA24 TxZ Turbo gate valve GATE VALVE
  • 12044-PA24 GATE VALVE
  • 12046-PE24 GATE VALVE
  • 12048-PA44 GATE VALVE
  • 12144-PA24 GATE VALVE
  • 12148-PA44 GATE VALVE
  • 14036-PE24 ISO63 GATE VALVE
  • 14040-JE24 GATE VALVE
  • 14040-PE34 GATE VALVE
  • 14040-PE34-1005 HEATER GATE VALVE
  • 14040-PE44 GATE VALVE
  • 14040-TE44 GATE VALVE
  • 14048-PE44 GATE VALVE
  • 64246-EX52 MOTOR ACTUATOR GATE VALVE
  • 64246-PE52 GATE VALVE
  • 64246-UE52 GATE VALVE
  • N/A PNEUMATIC FOR IMPLANTER GATE VALVE
  • S08 Series PNEUMATIC GATE VALVE
  • S10 Series UHV GATE VALVE GATE VALVE
  • S64 Series HV GATE VALVE GATE VALVE
  • 16852-JA24 400mm PENDULUM VALVE
  • 16852-JA28 PENDULUM VALVE
  • 65040-PA52-ACB1 PENDULUM VALVE
  • 65040-PA52-ACB2 PENDULUM VALVE
  • 65044-PH52 PENDULUM VALVE
  • 65044-PHHG PENDULUM VALVE
  • 65046-PH52 PENDULUM VALVE
  • 65050-JH52 PENDULUM VALVE
  • S65.1 PENDULUM VALVE
  • S65.2 PENDULUM VALVE
  • PM-4 SERVICE BOX
  • PM-6 SERVICE BOX
  • PM-7E SERVICE BOX
  • 0300X-CA24 VAT 0300X-CA24 Slit Valve|AMAT 3870-04338 SLIT VALVE
  • 0340X-MH24 For AMAT P500 SLIT VALVE
  • 0750X-UE24(CX0340) SLIT VALVE
  • S012 SLIT VALVE
  • S02 SLIT VALVE
  • S0750 VAT S0750 Slit Valve (CX0340) SLIT VALVE
  • S0750(CX0340) SLIT VALVE
  • S07512 SLIT VALVE
  • P500 CHAMBER SLIT VALVE SLIT VALVE

掲載していないメーカー・型式も取り扱っております。

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