株式會社TMH

Turbo Pump・Robot・RF電源・ESC&Ceramic Heater再生、半導體關聯零件之新品・中古品銷售、機台移設等

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TMH開始提供MCA ESC・Ceramic Heater・Magnet的再生服務。
2013/06/01

投稿1

MCA E-Chuck Heater(150mm, 200mm, 300mm)、PVD ESC、ALN Heater、CVD Ceramic Heater、AMAT製以及TEL製 Magnet全部均可提供再生服務。

代表型號如下:
– AMAT Producer Ceramic Heater (200mm, 300mm)
– 200mm DCxZ Ceramic Heater (Giga fill ALN Heater)
– 200mm DxZ Ceramic Heater
– 200mm TixZ Ceramic Heater (Gigafill ALN Heater)
– 200mm DcSxZ Ceramic Long Shaft Heater
– AMAT Dual Zone Ceramic Heater(200mm, 300mm)
– 300mm TEL Trias Stage Ceramic Heater
– AMAT CWXZ Ceramic Heater (200mm, 300mm)
– 300mm Purge Ceramic Heater
– Genus CVD 300mm ALN Heater
– APF Producer Ceramic Heater (200mm, 300mm)
– MCA E-Chuck Heater [PVD ESC]

 

更詳細的資訊請參考ESC再生一覽表

◆若未能從一覽表中找到您欲探索的型號,歡迎隨時寄函至sales@tmh-inc.co.jp咨詢!