Supported Products

PRODUCTS

Search by model number
List of repairs handled
Inventory list of new and used machines
Manufacturer list

NOVELLUS

ALN/Al203 Heater

  • Pedestal heater

    • 02-146672-00
    • 02-264308-00
    • 02-264309-00
    • 02-355935-00
    • 02-355937-00
    • 02-364187-00
    • 02-373416-00
    • 02-033920-00
    • 02-033134-01
    • 02-033134-00
    • 02-292391-00
    • 02-282384-00
    • 02-033134-02

Dome

  • Speed Dome

    • 02-10387-00/01
    • 02-307391-00
    • 02-307446-00
    • 02-293756-00
    • 02-042566-00/01
    • 02-336407-00
    • 02-374705-00
    • 02-282127-00

Equipement Parts

  • 02-00093-00 ASSY｜ ONE-ARM ROBOT
  • 16-144643-00 Novellus Pedestal Lifter｜300MM
  • 19-100586-00 Novellus Bellow｜ Pedestal Cylinder｜300MM
  • 16-128855-00 Novellus Bellow｜ Argon Dump｜300MM
  • 60-680027-00 Novellus ISO Valve (MDC)｜200MM/300MM
  • 27-00082-00
  • 27-00117-00

ESC

  • SPEED ESC 200mm Novellus Speed HDP ESC

    • 15-121119-00
    • 15-124447-05
    • 02-134264-00
    • 05-134264-00
    • 02-121096-00
    • 02-121642-00
    • 02-134263-00
    • 02-267095-00
    • 05-134263-00
    • 15-028190-00
    • 15-118976-00

Heater Block

  • HBLK, 150MM

    • 19-00155-00

  • HBLK, 150MM, 3 BALL

    • 19-027010-00

  • HBLK, 150MM, SLOT

    • 19-00155-01
    • 19-00154-01

  • HBLK, 150MM, SLOT, 4 HOLE

    • 19-032015-02

  • HBLK, 150MM, SLOT, 8 POCKET

    • 19-07547-01

  • HBLK, 200MM

    • 19-00154-00

  • HBLK, 200MM, 18 HOLE, SLD SPRT, EXT BAKE

    • 16-131278-00N

  • HBLK, 200MM, 24 HOLE

    • 19-024227-00/19-00154-02

  • HBLK, 200MM, 4 HOLE

    • 19-024227-02/19-00154-04

  • HBLK, 200MM, EXT BAKE

    • 19-00154-00N

  • HBLK, 200MM, SLOT, 20 HOLE

    • 19-024227-01/19-00154-03

  • HBLK, 200MM, SLOT, 28 HOLE

    • 19-032015-01

  • HBLK, 200MM, SLOT, 4 HOLE, SCRIBED

    • 02-335438-00/19-00154-09

  • HBLK, 200MM, SPL HTR

    • 02-258799-00/19-00154-00

  • HBLK, 200MM, SPL HTR, 4 HOLE

    • 02-265577-00

Motor Driver

  • SERVO MOTOR

    • RAMPV12154

Spindle

  • 02-312753-00
  • 02-317274-00
  • 27-278697-00
  • 02-400832-00
  • 02-397379-00
  • 02-276537-00
  • 02-110772-00
  • 02-106507-00
  • 02-269293-00
  • 19-251714-00
  • 02-252432-00
  • 02-312735-00
  • 02-324753-00
  • 02-370104-00
  • 02-232432-00
  • 02-159137-00

Robot

  • Indexer Controller CDP2407-2

    • 27-050014-02

Are you looking for a "genuine product"?

TMH can also supply generic parts and improved parts (CIP).
We also handle manufacturers and models not listed.
Please contact us for more information.

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