Chamber Parts

• 0200-10562

• ASSY, SYM DOOR,MAA, 2300

  • 839-045710-807

• BLK,FLOW,SIM CANTLVR,MAA,2300???

  • 714-045709-002

• CHMBR,TOP PC, 2300 MTL/PLY????

  • 715-027638-814

• CHMBR,TOP PC,HT CHOKE,MULTI ZO??

  • 715-027638-822

• LINER,CANTILVR,OUTR LNR MNT,23??

  • 714-045744-008

• LINER,FIXED OUTR,MAA,ACME,2300??

  • 714-045743-809

• LINER,SYM, HI FLOW, 2300,SRC???

  • 715-042721-858

• LINER,UPPER 300MM-Z AXIS W/CU???

  • 715-801021-838

• PLT,GAS DIST,300MM,W/GRV HTR-A??

  • 715-801916-808

Chiller

• DEX-40AZ
• Alliance
• CHｼﾘｰｽﾞ
• EX-2004

Equipement Parts

• 853-012123-001 ASSY ARM DRIVE
• 853-031776-001 PADDLE LIFT ASSY
• 853-012123-00X LAM Harmonic Arm Driver Assy｜150MM/200MM
• 853-032776-002 Lam TCP-9600 Paddle Lift｜150MM
• 853-012200-00X LAM Inner Gate Assy｜150MM/200MM
• 853-013542-002 LAM 4xxx ISO Valve｜150MM/200MM
• 853-013521-001 LAM 4xxx ISO Valve｜150MM/200MM
• 853-360073-001 LAM 9400 Turbo Bypass Valve｜150MM/200MM
• 853-032983-001 LAM 9400 Turbo ISO Valve｜150MM/200MM
• 853-032123-002 LAM ISO Valve｜ DSQ Chamber｜150MM/200MM

ESC

• LAM ESC FLEX ESC

  • 839-019090-324
  • 839-800327-315
  • 839-019090-328
  • 839-800327-385

• LAM ESC Kiyo 45 ESC

  • 839-019090-608

• LAM ESC KIYO ESC

  • 832-038915-201

• LAM ESC Kiyo-CX ESC

  • 839-019090-611

Generator

• FULLY REFURBISHED

  • LRC Match 853-032190-008
  • TCP Upper match 853-031685-001
  • DSQ Match 853-025735-008
  • Lam T Match 853-032294-002-E-ELM
  • Lam 490 RF Match Lam 490 RF Match
  • LAM 9500 Match + Controller 353-250118-001
  • Lam Mini Match 853-025083-001 REV N
  • Lam Research Match LAM AS1Q
  • Lo Fat Match 853-25907-0015

• Matching Box

  • 853-330951-021-B-262C

Motor Driver

• USAREM－A5DTE12

• SMC Heat Exchanger

  • INR-244-647C

Valve

• SLIT VALVE

  • ACT-SLIT VALVE

로봇

• 853-012123-004-2-DFT
• 853-012123-004-2-LL FDR